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Laser interferometer used for nanometer vibration measurements

著者名:
  • J. Sun ( Harbin Engineering Univ. (China) )
  • J. Yang ( Harbin Engineering Univ. (China) )
  • Z. Liu ( Harbin Engineering Univ. (China) )
  • L. Yuan ( Harbin Engineering Univ. (China) )
掲載資料名:
Fundamental Problems of Optoelectronics and Microelectronics III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6595
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467270 [0819467278]
言語:
英語
請求記号:
P63600/6595
資料種別:
国際会議録

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