Method of surface roughness measurement based on interferometry

Method of surface roughness measurement based on interferometry

著者名:

X. F. Zhang ( Harbin Engineering Univ. (China) )
Z. P. Wang ( Harbin Engineering Univ. (China) )
Y. E. Zhang ( Harbin Engineering Univ. (China) )
L. H. Wang ( Harbin Engineering Univ. (China) )
Y. M. Zhang ( Harbin Engineering Univ. (China) )

掲載資料名:

Fundamental Problems of Optoelectronics and Microelectronics III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6595

発行年:

2007

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467270 [0819467278]

言語:

英語

請求記号:

P63600/6595

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046902
シリーズID:	PA00000029
会議名:	Fundamental Problems of Optoelectronics and Microelectronics
回次:	2006 : 3rd
会議開催地:	Harbin, China
会議開催年:	2006.09.12-2006.09.14

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