Electrical test structures for the characterisation of optical proximity correction
- 著者名:
A. Tsiamis ( The Univ. of Edinburgh (United Kingdom) ) S. Smith ( The Univ. of Edinburgh (United Kingdom) ) M. McCallum ( Nikon Precision Europe GmbH (United Kingdom) ) A. C. Hourd ( Compugraphics International Ltd. (United Kingdom) ) J. T. M. Stevenson ( The Univ. of Edinburgh (United Kingdom) ) A. J. Walton ( The Univ. of Edinburgh (United Kingdom) ) - 掲載資料名:
- EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6533
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466556 [0819466557]
- 言語:
- 英語
- 請求記号:
- P63600/6533
- 資料種別:
- 国際会議録
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