Production evaluation of automated reticle defect printability prediction application
- 著者名:
- W. B. Howard ( KLA-Tencor Corp. (USA) )
- S. Pomeroy ( KLA-Tencor Corp. (USA) )
- R. Moses ( Advanced Mask Technology Ctr. (Germany) )
- T. Thaler ( Advanced Mask Technology Ctr. (Germany) )
- 掲載資料名:
- EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6533
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466556 [0819466557]
- 言語:
- 英語
- 請求記号:
- P63600/6533
- 資料種別:
- 国際会議録
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10
国際会議録
Aerial image measurement technique for automated reticle defect disposition (ARDD) in wafer fabs
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