Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography
- 著者名:
H. Watanabe ( Gigaphoton Inc. (Japan) ) S. Komae ( Gigaphoton Inc. (Japan) ) S. Tanaka ( Ushio Inc. (Japan) ) R. Nohdomi ( Gigaphoton Inc. (Japan) ) T. Yamazaki ( Gigaphoton Inc. (Japan) ) H. Nakarai ( Gigaphoton Inc. (Japan) ) J. Fujimoto ( Gigaphoton Inc. (Japan) ) T. Matsunaga ( Komatsu Ltd. (Japan) ) T. Saito ( Gigaphoton inc. (Japan) ) K. Kakizaki ( Ushio Inc. (Japan) ) H. Mizoguchi ( Gigaphoton Inc. (Japan) ) - 掲載資料名:
- Optical microlithography XX
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6520
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466396 [0819466395]
- 言語:
- 英語
- 請求記号:
- P63600/6520
- 資料種別:
- 国際会議録
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