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Phase-shifted assist feature OPC for sub-45-nm node optical lithography

著者名:
  • G. Yoon ( SAMSUNG Electronics Co., Ltd. (South Korea) )
  • H. Kim ( SAMSUNG Electronics Co., Ltd. (South Korea) )
  • J. Lee ( SAMSUNG Electronics Co., Ltd. (South Korea) )
  • S. Choi ( SAMSUNG Electronics Co., Ltd. (South Korea) )
  • W. Han ( SAMSUNG Electronics Co., Ltd. (South Korea) )
掲載資料名:
Optical microlithography XX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6520
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466396 [0819466395]
言語:
英語
請求記号:
P63600/6520
資料種別:
国際会議録

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