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Phenolic molecular glasses as resists for next-generation lithography

著者名:
X. Andre ( Cornell Univ. (USA) )
J. K. Lee ( Cornell Univ. (USA) )
A. D. Silva ( Cornell Univ. (USA) )
N. Felix ( Cornell Univ. (USA) )
C. K. Ober ( Cornell Univ. (USA) )
H. B. Cao ( Intel Corp. (USA) )
H. Deng ( Intel Corp. (USA) )
H. Kudo ( Kanagawa Univ. (Japan) )
D. Watanabe ( Kanagawa Univ. (Japan) )
T. Nishikubo ( Kanagawa Univ. (Japan) )
さらに 5 件
掲載資料名:
Advances in resist materials and processing technology XXIV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6519
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466389 [0819466387]
言語:
英語
請求記号:
P63600/6519
資料種別:
国際会議録

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