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A new SEM CD operator verified against Monte Carlo simulations

著者名:
  • C. G. Frase ( Physikalisch-Technische Bundesanstalt (Germany) )
  • D. Gnieser ( Physikalisch-Technische Bundesanstalt (Germany) )
  • K. Dirscherl ( Danish Fundamental Metrology, Ltd. (Denmark) )
  • E. Buhr ( Physikalisch-Technische Bundesanstalt (Germany) )
  • H. Bosse ( Physikalisch-Technische Bundesanstalt (Germany) )
掲載資料名:
Metrology, inspection, and process control for microlithography XXI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6518
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
言語:
英語
請求記号:
P63600/6518
資料種別:
国際会議録

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