Single crystal critical dimension reference materials (SCCDRM): process optimization for the next generation of standards

Single crystal critical dimension reference materials (SCCDRM): process optimization for the next generation of standards

著者名:

R. G. Dixson ( National Institute of Standards and Technology (USA) )
W. F. Guthrie ( National Institute of Standards and Technology (USA) )
M. Cresswell ( National Institute of Standards and Technology (USA) )
R. A. Allen ( National Institute of Standards and Technology (USA) )
N. G. Orji ( National Institute of Standards and Technology (USA) )

掲載資料名:

Metrology, inspection, and process control for microlithography XXI

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6518

発行年:

2007

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466372 [0819466379]

言語:

英語

請求記号:

P63600/6518

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046825
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Metrology, Inspection, and Process Control for Microlithography
回次:	2007 : 21st
会議開催地:	San Jose, CA, USA
会議開催年:	2007.02.26-2007.03.01

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1 国際会議録 Traceable atomic force microscope dimensional metrology at NIST [6152-25] Dixson, R., Orji, N. G., Fu, J., Cresswell, M., Allen, R., Guthrie, W. SPIE - The International Society of Optical Engineering	7 国際会議録 Photomask applications of traceable atomic force microscope dimensional metrology at NIST R. Dixson, N. G. Orji, J. Potzick, J. Fu, R. A. Allen Society of Photo-optical Instrumentation Engineers
2 国際会議録 TEM calibration methods for critical dimension standards N. G. Orji, R. G. Dixson, D. I. Garcia-Gutierrez, B. D. Bunday, M. Bishop, M. W. Cresswell, R. A. Allen, J. A. Allgair SPIE - The International Society of Optical Engineering	8 国際会議録 Progress on implementation of a CD-AFM・based reference measurement system [6152-24] Orji, N. G., Martinez, A., Dixson, R., Allgair, J. SPIE - The International Society of Optical Engineering
3 国際会議録 Comparison and uncertainties of standards for critical dimension atomic force microscope tip width calibration R. Dixson, N. G. Orji SPIE - The International Society of Optical Engineering	9 国際会議録 Reference metrology using a next-generation CD-AFM Dixson, R., Guerry, A. SPIE - The International Society of Optical Engineering
4 国際会議録 Re-calibration of the NIST SRM 2059 master standard using traceable atomic force microscope metrotogy R. Dixson, J. Potzick, N. G. Orji Society of Photo-optical Instrumentation Engineers	10 国際会議録 Application of carbon nanotube probes in a critical dimension atomic force microscope B. C. Park, J. Choi, S. J. Ahn, D. Kim, J. Lyou, R. Dixson, N. G. Orji, J. Fu, T. V. Vorburger SPIE - The International Society of Optical Engineering
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