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TEM calibration methods for critical dimension standards

著者名:
N. G. Orji ( National Institute of Standards and Technology (USA) )
R. G. Dixson ( National Institute of Standards and Technology (USA) )
D. I. Garcia-Gutierrez ( Advanced Technology Development Facility (USA) )
B. D. Bunday ( International SEMATECH Manufacturing Initiative (USA) )
M. Bishop ( International SEMATECH Manufacturing Initiative (USA) )
M. W. Cresswell ( National Institute of Standards and Technology (USA) )
R. A. Allen ( National Institute of Standards and Technology (USA) )
J. A. Allgair ( International SEMATECH Manufacturing Initiative (USA) )
さらに 3 件
掲載資料名:
Metrology, inspection, and process control for microlithography XXI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6518
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
言語:
英語
請求記号:
P63600/6518
資料種別:
国際会議録

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