Innovative materials tailored for advanced micro-optic applications
- 著者名:
R. Himmelhuber ( micro resist technology GmbH. (Germany) and College of Optical Sciences, Univ. of Arizona (USA) ) M. Fink ( micro resist technology GmbH (Germany) ) K. Pfeiffer ( micro resist technology GmbH (Germany) ) U. Ostrzinski ( micro resist technology GmbH (Germany) ) A. Klukowska ( micro resist technology GmbH (Germany) ) G. Gruetzner ( micro resist technology GmbH (Germany) ) R. Houbertz ( Fraunhofer-Institut fur Silicatforschung (Germany) ) H. Wolter ( Fraunhofer-Institut fur Silicatforschung (Germany) ) - 掲載資料名:
- Photonics packaging, integration, and interconnects VII : 23-25 January 2007, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6478
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465917 [0819465917]
- 言語:
- 英語
- 請求記号:
- P63600/6478
- 資料種別:
- 国際会議録
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12
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