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Performance and reliability test of MEMS optical scanners

著者名:
S. Kurth ( Fraunhofer Institute for Reliability and Microintegration (Germany) )
C. Kaufmann ( Chemnitz Univ. of Technology (Germany) )
R. Hahn ( Chemnitz Univ. of Technology (Germany) )
J. Mehner ( Fraunhofer Institute for Reliability and Microintegration (Germany) )
W. Doetzel ( Chemnitz Univ. of Technology (Germany) )
T. Gessner ( Fraunhofer Institute for Reliability and Microintegration (Germany) and Chemnitz Univ. of Technology (Germany) )
さらに 1 件
掲載資料名:
Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6463
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465764 [0819465763]
言語:
英語
請求記号:
P63600/6463
資料種別:
国際会議録

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