Fabrication of photonic crystals using chemical lithography
- 著者名:
P. Yao ( Univ. of Delaware (USA) ) M. Murakowski ( Univ. of Delaware (USA) ) L. Prather ( Univ. of Delaware (USA) ) G. J. Schneider ( Univ. of Delaware (USA) ) J. Murakowski ( Univ. of Delaware (USA) ) D. W. Prather ( Univ. of Delaware (USA) ) - 掲載資料名:
- Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6462
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465757 [0819465755]
- 言語:
- 英語
- 請求記号:
- P63600/6462
- 資料種別:
- 国際会議録
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7
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Fabrication of 3D silicon photonic crystal structures using conventional micromachining technology
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