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Laser direct-write and crystallization of FeSi2 micro-dot array for NIR light-emitting device application

著者名:
  • A. Narazaki ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • R. Kurosaki ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • T. Sato ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • Y. Kawaguchi ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • H. Niino ( National Institute of Advanced Industrial Science and Technology (Japan) )
掲載資料名:
Photon processing in microelectronics and photonics VI : 22-25 January 2007, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6458
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465719 [0819465712]
言語:
英語
請求記号:
P63600/6458
資料種別:
国際会議録

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