High-productivity DRIE solutions for 3D-SiP and MEMS volume manufacturing

High-productivity DRIE solutions for 3D-SiP and MEMS volume manufacturing

著者名:

M. Puech ( Alcatel Micro Machining Systems (France) )

J. M. Thevenoud ( Alcatel Micro Machining Systems (France) )

N. Launay ( Alcatel Micro Machining Systems (France) )

N. Arnal ( Alcatel Micro Machining Systems (France) )

P. Godinat ( Alcatel Micro Machining Systems (France) )

B. Andrieu ( Alcatel Micro Machining Systems (France) )

J. M. Gruffat ( Alcatel Micro Machining Systems (France) )

さらに 2 件

掲載資料名:

Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6415

発行年:

2007

ペーパー番号:

64150I

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465238 [0819465232]

言語:

英語

請求記号:

P63600/6415

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046727
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Micro- and Nanotechnology
回次:	2006 : 3rd
会議開催地:	Adelaide, Australia
会議開催年:	2006.12.11-2006.12.13
論文注記:	64150I ; 3rd symposium on materials, processes, packaging, and systems, 11-13 December 2006, Adelaide, Australia

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