Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application
- 著者名:
- Z. J. Wang ( Tohoku Univ. (Japan) )
- H. Kokawa ( Tohoku Univ. (Japan) )
- H. Takizawa ( Tohoku Univ. (Japan) )
- M. Ichiki ( National Institute of Advanced Industrial Science and Technology (Japan) )
- R. Maeda ( National Institute of Advanced Industrial Science and Technology (Japan) )
- 掲載資料名:
- Smart materials IV : 11-13 December 2006, Adelaide, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6413
- 発行年:
- 2007
- ペーパー番号:
- 641308
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465214 [0819465216]
- 言語:
- 英語
- 請求記号:
- P63600/6413
- 資料種別:
- 国際会議録
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3
国際会議録
Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition
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