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Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application

著者名:
  • Z. J. Wang ( Tohoku Univ. (Japan) )
  • H. Kokawa ( Tohoku Univ. (Japan) )
  • H. Takizawa ( Tohoku Univ. (Japan) )
  • M. Ichiki ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • R. Maeda ( National Institute of Advanced Industrial Science and Technology (Japan) )
掲載資料名:
Smart materials IV : 11-13 December 2006, Adelaide, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6413
発行年:
2007
ペーパー番号:
641308
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465214 [0819465216]
言語:
英語
請求記号:
P63600/6413
資料種別:
国際会議録

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