White light displacement sensor by spectro-polarization modulator
- 著者名:
- Y. Otani ( Tokyo Univ. of Agriculture and Technology (Japan) )
- T. Wakayama ( Saitama Medical Univ. (Japan) )
- D. Orlov ( Tokyo Univ. of Agriculture and Technology (Japan) )
- N. Umeda ( Tokyo Univ. of Agriculture and Technology (Japan) )
- T. Yoshizawa ( Saitama Medical Univ. (Japan) )
- 掲載資料名:
- Two- and three-dimensional methods for inspection and metrology IV : 1-3 October, 2006, Boston, Massachusetts, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6382
- 発行年:
- 2006
- ペーパー番号:
- 638205
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464804 [0819464805]
- 言語:
- 英語
- 請求記号:
- P63600/6382
- 資料種別:
- 国際会議録
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