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White light displacement sensor by spectro-polarization modulator

著者名:
  • Y. Otani ( Tokyo Univ. of Agriculture and Technology (Japan) )
  • T. Wakayama ( Saitama Medical Univ. (Japan) )
  • D. Orlov ( Tokyo Univ. of Agriculture and Technology (Japan) )
  • N. Umeda ( Tokyo Univ. of Agriculture and Technology (Japan) )
  • T. Yoshizawa ( Saitama Medical Univ. (Japan) )
掲載資料名:
Two- and three-dimensional methods for inspection and metrology IV : 1-3 October, 2006, Boston, Massachusetts, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6382
発行年:
2006
ペーパー番号:
638205
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464804 [0819464805]
言語:
英語
請求記号:
P63600/6382
資料種別:
国際会議録

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