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Scanning white-light interferometry for microstructures geometrical characterization

著者名:
  • T. Guo ( Tianjin Univ. (China) )
  • C. Hu ( Tianjin Univ. (China) )
  • J. Chen ( Tianjin Univ. (China) )
  • X. Fu ( Tianjin Univ. (China) )
  • X. Hu ( Tianjin Univ. (China) )
掲載資料名:
Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo -Electronic Technology, and Artificial Intelligence : 13-15 October 2006, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6357
発行年:
2006
パート:
2
ペーパー番号:
63573O
開始ページ:
63573O-1
終了ページ:
63573O-7
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464521 [081946452X]
言語:
英語
請求記号:
P63600/6357
資料種別:
国際会議録

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