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Amorphization/Templated Recrystallization (ATR) Method for Hybrid Orientation Substrates

著者名:
K. L. Saenger
J. P. de Souza
K. E. Fogel
J. A. Ott
A. Reznicek
C. Y. Sung
H. Yin
D. K. Sadana
さらに 3 件
掲載資料名:
Transistor scaling--methods, materials and modeling : symposium held April 18-19, 2006, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
913
発行年:
2006
開始ページ:
3
終了ページ:
12
総ページ数:
10
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998698 [1558998691]
言語:
英語
請求記号:
M23500/913
資料種別:
国際会議録

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