Blank Cover Image

Low Temperature Poly-Si Sputtering Deposition Through Metal-induced Crystallization and Its Application

著者名:
掲載資料名:
Amorphous and polycrystalline thin-film silicon science and technology--2006 : symposium held April 18-21, 2006, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
910
発行年:
2007
開始ページ:
523
終了ページ:
528
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998667 [1558998667]
言語:
英語
請求記号:
M23500/910
資料種別:
国際会議録

類似資料:

1 国際会議録 Modeling of Cu Surface Precipitation and Out-Diffusion From Silicon Wafers

Hsiu-Wu Guo, Scott T. Dunham

Materials Research Society
7 国際会議録 LOW TEMPERATURE EPITAXY ON H-PASSIVATED Si(100) BY SPUTTER DEPOSITION

Chen, Chau-Chen, Smith, Donald L., Anderson, Greg, Hagstrom, Stig B.

Materials Research Society
2 国際会議録 Modeling of Effect of Stress on C Diffusion/Clustering in Si

Hsiu-Wu Guo, Chihak Ahn, Scott T. Dunham

Materials Research Society
8 国際会議録 Metal-Induced Low-Temperature Crystallization of Amorphous SiGe on Insulating Films

Miyao, M., Kanno, H., Tsunoda, I., Sadoh, T., Kenjo, A.

Materials Research Society
3 国際会議録 Low Temperature Deposition of Poly-SiGe Films byDual Ion Beam Sputtering

Saha,Chumki, Das,S., Ray,S.K., Lahiri,S.K.

SPIE - The International Society for Optical Engineering
9 国際会議録 Characteristics of single-pulse excimer laser beam profile on the low-temperature poly-Si TFTs

Shih,C.-J., Wang,L.-M., Chang,S.-C., Lu,I-M., Wu,I-W.

SPIE - The International Society for Optical Engineering
4 国際会議録 Low Temperature Polycrystalline Silicon Thin Film Transistors Fabricated by Electroless Plating Ni Induced Crystallization of Amorphous Si

Chao, C.-W., Sermon Wu, Y.C., Chen, Y.-C., Hu, G.-R., Feng, M.-S.

Electrochemical Society
10 国際会議録 68 In-Situ Observation of Metal-induced Crystallization of Amorphous Si0.8Ge0.2 Thin Films

Yu, C. H., Wu, W. W., Chen, L.J.

Electrochemical Society
5 国際会議録 Low-temperature poly-Si TFT characteristics in the overlapped area of excimer laser long-axis scans

Chang,S.-C., Shih,C.-J., Lu,I-M., Wu,I-W.

SPIE - The International Society for Optical Engineering
11 国際会議録 Low Temperature Deposition of Metal Oxide Thin Films in Supercritical Carbon Dioxide using Metal-organic Precursors

Theodosia Gougousi, Zhiying Chen

Materials Research Society
6 国際会議録 Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing and Its Application to Low Temperature poly-Si Thin Film Transistors

Y. Sugawara, Y. Uraoka, H. Yano, T. Hatayama, T. Fuyuki

Electrochemical Society
12 国際会議録 Optimization of RF-Sputtered ITO Films for High NIR Transparency at Low Deposition Temperature

Zhou , J., Wu, X., Gessert, T. A., Yan, Y., Teeter, G., Mountinho, H. R.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12