Roughness, Impurities and Strain in Low-Temperature Epitaxial Silicon Films Grown by Tantalum Filament Hot-Wire Chemical Vapor Deposition | 東京工業大学附属図書館文献データベース

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Roughness, Impurities and Strain in Low-Temperature Epitaxial Silicon Films Grown by Tantalum Filament Hot-Wire Chemical Vapor Deposition

著者名:

Charles W. Teplin

Matthew W. Page

Eugene W. Iwaniczko

Robert M. Ready

Helio M. Moutinho

Howard M. Branz

さらに 4 件

掲載資料名:

Amorphous and polycrystalline thin-film silicon science and technology--2006 : symposium held April 18-21, 2006, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

910

発行年:

2007

開始ページ:

343

終了ページ:

352

総ページ数:

10

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558998667 [1558998667]

言語:

英語

請求記号:

M23500/910

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046614
シリーズID:	PA00000011
会議名:	MRS Spring Meeting : Symposium A
回次:	2006
会議開催地:	San Francisco, California, USA
会議開催年:	2006.04.18-2006.04.21

類似資料:

1 国際会議録 Silicon Homoepitaxy Using Tantalum-Filament Hot-Wire Chemical Vapor Deposition Teplin, Charles W., Iwaniczko, Eugene, Jones, Kim M., Reedy, Robert, To, Bobby, Branz, Howard M. Materials Research Society	7 国際会議録 Physics of Solid-Phase Epitaxy of Hydrogenated Amorphous Silicon for Thin Film Si Photovoltaics Paul Stradins, Yanfa Yan, Robert Reedy, David L. Young, Charles W. Teplin, Eugene Iwaniczko, Yueqin Xu, Kim Jones, Glenn … Materials Research Society
2 国際会議録 Comparative Study of Hot-Wire Chemical Vapor Deposition Onto (100) Si Near 600℃: Epitaxial and Polycrystalline Silicon Films Charles W. Teplin, Howard M. Branz, Kim M. Jones, Bobby To, Eugene Iwaniczko, Paul Stradins Materials Research Society	8 国際会議録 Solid Phase Crystallization of Hot-Wire CVD Amorphous Silicon Films Young, David L., Stradins, Paul, Iwaniczko, Eugene, To, Bobby, Reedy, Bob, Yan, Yanfa, Branz, Howard M., Lohr, John, … Materials Research Society
3 国際会議録 Amorphous To Microcrystalline Transition In Thickness-Graded Hot-Wire Cvd Silicon Films Wang, Qi, Perkins, John, Moutinho, Helio, To, Bobby, Branz, Howard M. Materials Research Society	9 国際会議録 High Voltage Amorphous Silicon Solar Cells By Hot-Wire Chemical Vapor Deposition Wang, Qi, Iwaniczko, Eugene Materials Research Society
4 国際会議録 In Situ Observation of Silicon Epitaxy Breakdown With Real-Time Spectroscopic Ellipsometry Teplin, Charles W., Levi, Dean H., Wang, Qi, Iwaniczko, Eugene, Jones, Kim M., Branz, Howard M. Materials Research Society	10 国際会議録 Combinatorial Approach to Thin-Film Silicon Materials and Devices Wang, Qi, Tessler, Leandro R., Moutinho, Helio, To, Bobby, Perkins, John, Han, Daxing, Ginley, Dave, Branz, Howard M. Materials Research Society
5 国際会議録 Quality and Growth Rate of Hot-wire Chemical Vapor Deposition Epitaxial Si Layers Charles W Teplin, Ina T. Martin, Kim M. Jones, David Young, Manuel J. Romero, Robert C. Reedy, Howard M. Branz, Paul … Materials Research Society	11 国際会議録 The Influence of Electrons From the Filament on the Material Properties of Hydrogenated Amorphous Silicon Growth by the Hot-Wire Chemical Vapor Deposition … Nelson, Brent P., Wang, Qi, Iwaniczko, Eugene, Mahan, A. H., Crandall, R. S. MRS - Materials Research Society
6 国際会議録 Hot-Wire Chemical Vapor Deposition Epitaxy on Polycrystalline Silicon Seeds on Glass Charles W. Teplin, Howard M. Branz, Kim M. Jones, Manuel J. Romero, Paul Stradins, Stefan Gall Materials Research Society	12 国際会議録 Cone Kinetics Model: Insights into the Morphologies of Mixed-phase Silicon Film Growth Howard M. Branz, Paul Stradins, Charles W. Teplin Materials Research Society

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