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Effects of HWCVD-Deposited Seed Layers on Hydrogenated Microcrystalline Silicon Films on Glass Substrates

著者名:
掲載資料名:
Amorphous and polycrystalline thin-film silicon science and technology--2006 : symposium held April 18-21, 2006, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
910
発行年:
2007
開始ページ:
213
終了ページ:
218
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998667 [1558998667]
言語:
英語
請求記号:
M23500/910
資料種別:
国際会議録

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