Sodium Enhanced Oxidation of Si-Face 4H-SiC: A Method to Remove Near Interface Traps

Sodium Enhanced Oxidation of Si-Face 4H-SiC: A Method to Remove Near Interface Traps

著者名:

E.O. Sveinbjornsson

掲載資料名:

Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006

シリーズ名:

Materials science forum

シリーズ巻号:

556-557

発行年:

2007

開始ページ:

487

終了ページ:

492

総ページ数:

6

出版情報:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494422 [0878494421]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046610
シリーズID:	PA00000012
会議名:	European Conference on Silicon Carbide and Related Materials
回次:	6th
会議開催地:	Newcastle upon Tyne, UK
会議開催年:	2006.09.00

類似資料:

1 国際会議録 Formation of Deep Traps at the 4H-SiC/SiO2 Interface when Utilizing Sodium Enhanced Oxidation F. Allerstam, G. Gudjonsson, E.O. Sveinbjornsson, T. Rodle, R. Jos Trans Tech Publications	7 国際会議録 High Frequency 4H-SiC MOSFETs G. Gudjonsson, F. Allerstam, P.A. Nilsson, H. Hjelmgren, E.O. Sveinbjornsson, H. Zirath, T. Rodle, R. Jos Trans Tech Publications
2 国際会議録 Field Effect Mobility in n-Channel Si Face 4H-SiC MOSFET with Gate Oxide Grown on Aluminum Ion-Implanted Material Gudjonsson, G., Olafsson, H. O., Allerstam, F., Nilsson, P. A., Sveinbjornsson, E. O., Rodle, T., Jos, R. Trans Tech Publications	8 国際会議録 On Shallow Interface States in n-Type 4H-SiC Metal-Oxide-Semiconductor Structures Olafsson, H.O., Allerstam, F., Sveinbjornsson, E.O. Trans Tech Publications
3 国際会議録 High Channel Mobility 4H-SiC MOSFETs Sveinbjornsson, E.O., Gudjonsson, G., Allerstam, F., Olafsson, H.O., Nilsson, P.A., Zirath, H., Rodle, T., Jos, R. Trans Tech Publications	9 国際会議録 Sodium Enhanced Oxidation: Absence of Shallow Interface Traps after Removal of Sodium Ions from the SiO₂/4H-SiC Interface P.G. Hermannsson, F. Allerstam, S. Hauksson, E.Ö. Sveinbjörnsson Trans Tech Publications
4 国際会議録 High Field Effect Mobility in Si Face 4H-SiC MOSFET Made on Sublimation Grown Epitaxial Material Sveinbjornsson, E. O., Olafsson, H. O., Gudjonsson, G., Allerstam, F., Nilsson, P. A., Syvajarvi, M., Yakimova, R., … Trans Tech Publications	10 国際会議録 Effect of High Temperature Oxidation of 4H-SiC on the Near-Interface Traps Measured by TDRC F. Allerstam, E.Ö. Sveinbjörnsson Trans Tech Publications
5 国際会議録 High Field Effect Mobility in 6H-SiC MOSFET with Gate Oxides Grown in Alumina Environment Allerstam, F., Gudjonsson, G., Olafsson, H. O., Sveinbjornsson, E. O., Rodle, T., Jos, R. Trans Tech Publications	11 国際会議録 Enhancement of Inversion Channel Mobility in 4H-SiC MOSFETs using a Gate Oxide Grown in Nitrous Oxide (N2O) Gudjonsson, G., Olafsson, H.O., Sveinbjoernsson, E.O. Trans Tech Publications
6 国際会議録 High Power-Density 4H-SiC RF MOSFETs Gudjonsson, G., Allerstam, F., Olafsson, H.O., Nilsson, P.A., Hjelmgren, H., Andersson, K., Sveinbjornsson, E.O., … Trans Tech Publications	12 国際会議録 On Shallow Interface States in n-Type 4H-SiC Metal-Oxide-Semiconductor Structures Olafsson, H.OE., Allerstam, F., Sveinbjornsson, E.OE. Trans Tech Publications

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