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Dependence of the Dielectric Properties of Pt/ZrO2/Si Capacitors Prepared by RF-Magnetron Sputtering on the Oxygen Partial Pressure and the Annealing Temperature

著者名:
掲載資料名:
Eco-materials processing and design VIII : ISEPD-8, proceedings of the 8th International Symposium on Eco-Materials Processing and Design, January 11-13, 2007, Kitakyushu, Japan
シリーズ名:
Materials science forum
シリーズ巻号:
544-545
発行年:
2007
開始ページ:
937
終了ページ:
940
総ページ数:
4
出版情報:
Stafa-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494316 [0878494316]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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