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Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition

著者名:
掲載資料名:
THERMEC 2006 : supplement to THERMEC 2006, 5th International conference on processing and manufacturing of advanced materials, July 4-8, 2006, Vancouver, Canada
シリーズ名:
Materials science forum
シリーズ巻号:
539-543(4)
発行年:
2007
巻:
539-543
開始ページ:
3574
終了ページ:
3579
総ページ数:
6
出版情報:
Stafa-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494286 [0878494286]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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