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Highly accurate hybrid-OPC method for sub-60nm memory device [6156-42]

著者名:
  • Yune, H.-S. ( Hynix Semiconductor Inc. (South Korea) )
  • Kim, C.-K. ( Hynix Semiconductor Inc. (South Korea) )
  • Ahn Y B ( Hynix Semiconductor Inc. (South Korea) )
  • Nam B H ( Hynix Semiconductor Inc. (South Korea) )
  • Yim D ( Hynix Semiconductor Inc. (South Korea) )
掲載資料名:
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6156
発行年:
2006
開始ページ:
61561A
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461995 [0819461997]
言語:
英語
請求記号:
P63600/6156
資料種別:
国際会議録

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