Across field CD control improvement for critical level imaging: new applications for layout correction and optimization [6156-48]
- 著者名:
- Zach, F. ( Invarium Inc. (USA) )
- Percin, G. ( Invarium Inc. (USA) )
- Sezginer, A. ( Invarium Inc. (USA) )
- 掲載資料名:
- Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6156
- 発行年:
- 2006
- 開始ページ:
- 61560I
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461995 [0819461997]
- 言語:
- 英語
- 請求記号:
- P63600/6156
- 資料種別:
- 国際会議録
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