The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer [6186-33]

The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer [6186-33]

著者名:

Tian L.
Wang W.
Liu X. W
Wang X. L
Bao Zh Y. ( Harbin Institute of Technology (China) )

掲載資料名:

MEMS, MOEMS, and Micromachining II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6186

発行年:

2006

開始ページ:

61860W

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819462428 [081946242X]

言語:

英語

請求記号:

P63600/6186

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016411
シリーズID:	PA00000029
会議名:	Photonics Europe : MEMS, MOEMS, and Micromachining
回次:	2006 : 2nd
会議開催地:	Strasbourg, France
会議開催年:	2006.04.03-2006.04.04

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