MEMS acoustic sensor using PMN-PT single-crystal diaphragm [6374A-09]

MEMS acoustic sensor using PMN-PT single-crystal diaphragm [6374A-09]

著者名:

Lee, S. Q.
Kim, H. J.
Park, K. H. ( Electronics and Telecommunications Research Institute (South Korea) )
Hong, Y. K.
Moon, K. S. ( San Diego State Univ. (USA) )

掲載資料名:

Optomechatronic Actuators, Manipulation, and Systems Control

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6374

発行年:

2006

開始ページ:

637409

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819464729 [0819464724]

言語:

英語

請求記号:

P63600/6374

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016374
シリーズID:	PA00000029
会議名:	Optics East : Optomechatronic Actuators, Manipulation, and Systems Control
回次:	2006
会議開催地:	Boston, MA, USA
会議開催年:	2006.10.01-2006.10.03

類似資料:

1 国際会議録 PMN-PT piezoelectric near field optical probe for data storage (Invited Paper) [6374A-10] Hong, Y. K., Lee, S. Q., Kim, E. K., Park, K. H., Moon, K. S. SPIE - The International Society of Optical Engineering	7 国際会議録 PMN-PT single crystal resonators for sensing acetone vapors M. Frank, T. T. Nguyen, F. M. Makau, K. S. Moon, S. Kassegne Society of Photo-optical Instrumentation Engineers
2 国際会議録 Fabrication of a piezoelectric biosensor based on a PZN-PT/PMN-PT single crystal thin film Hong, Y. K., Park, H. -K., Lee, S. Q, Moon, K. S., Levy, M. SPIE - The International Society of Optical Engineering	8 国際会議録 Electrical Characterization of Semiconducting Nanowire and Its Application to a Chemical Sensor J. Park, S. Moon, E. Kim, H. Lee, K. Park Electrochemical Society
3 国際会議録 A novel capacitive type miniature microphone with a flexure hinge diaphragm [6374A-37] Kim, H. J., Lee, S. Q., Park, K. H. SPIE - The International Society of Optical Engineering	9 国際会議録 A single-crystal piezoelectric scanner for scanning probe microscopy Moon, K. S., Hong, Y. K., Lee, S.-Q SPIE-The International Society for Optical Engineering
4 国際会議録 PMN-PT single crystal resonators for ultra-sensitive vapor sensing (Invited Paper)[6048-17] Moon K. S, Hong Y. K SPIE - The International Society of Optical Engineering	10 国際会議録 Characterization of new electrooptical PMN-PT single crystal [5962-101] Pavlenko, V., Akimov, A., Kurilkina, S., Utkin, I., Lee, H. -Y. SPIE - The International Society of Optical Engineering
5 国際会議録 Measurement of all the elastic, piezoelectric, and dielectric properties of PMN-PT single crystals Lee, S.-H., Lee, S.-S., Roh, Y.R., Lee, H.-Y., Han, J.-H. SPIE-The International Society for Optical Engineering	11 国際会議録 A Miniature Silicon Condenser Microphone Improved with a Flexure Hinge Diaphragm and a Large Back Volume H.J. Kim, S.Q. Lee, J.W. Lee, S.K. Lee, K.H. Park Materials Research Society
6 国際会議録 Design of a PMN-PT-based monolithic nanomanipulator K. S. Moon, J. Yi, Y. K. Hong, J. A. L. Mathers Society of Photo-optical Instrumentation Engineers	12 国際会議録 Development of a nanoindenter using a piezoelectric actuator Park, H. -K., Hong, Y. K., Lee, S. Q, Moon, K. S., Kwon, D. SPIE - The International Society of Optical Engineering

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