Effects of TI addiction in WO3 thin film ammonia gas sensor prepared by dc reactive magnetron sputtering [6358-36]
- 著者名:
Hu, M. ( Tianjin Univ. (China) ) Yong, C. ( Tianjin Univ. (China) and Kim Check Univ. (South Korea) ) Feng, Y. Lv, Y. Han, L. Liang, J. Wang, H. ( Tianjin Univ. (China) ) - 掲載資料名:
- Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6358
- 発行年:
- 2006
- パート:
- 1
- 開始ページ:
- 635810
- 終了ページ:
- 635810
- 総ページ数:
- 1
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464538 [0819464538]
- 言語:
- 英語
- 請求記号:
- P63600/6358
- 資料種別:
- 国際会議録
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10
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Pulsed DC Reactive Magnetron Sputtering of AlN Thin Films on High Frequency LTCC Substrates
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