Illumination optimization for 65nm technology node [6349-188]
- 著者名:
- Wang, C.-H.
- Liu, Q. ( Semiconductor Manufacturing International Corp. (China) )
- Zhang, L. ( Mentor Graphics Corp. (China) )
- Hung, C.-Y. ( Tsing-Hua Univ. (China) )
- 掲載資料名:
- Photomask Technology 2006
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6349
- 発行年:
- 2006
- パート:
- 2
- 開始ページ:
- 63494V
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464446 [0819464449]
- 言語:
- 英語
- 請求記号:
- P63600/6349
- 資料種別:
- 国際会議録
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