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Quartz etch solutions for 45-nm phase-shift masks [6349-119]

著者名:
Chandrachood, M.
Grimbergen, M.
Leung, T. Y. B.
Panayil, S.
Ibrahim, I.
Kumar, A. ( Applied Materials Inc. (USA) )
さらに 1 件
掲載資料名:
Photomask Technology 2006
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6349
発行年:
2006
パート:
2
開始ページ:
634934
終了ページ:
634934
総ページ数:
1
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464446 [0819464449]
言語:
英語
請求記号:
P63600/6349
資料種別:
国際会議録

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