Analytic and laser vibrometry study of squeeze film damping of MEMS cantilevers [6345-48]

Analytic and laser vibrometry study of squeeze film damping of MEMS cantilevers [6345-48]

著者名:

Vignola, J. F. ( U.S. Naval Research Lab. (USA) )
Judge, J. A. ( The Catholic Univ. of America (USA) )
Lawrence, E. ( Polytec, Inc. (USA) )
Jarzynski, J. ( U.S. Naval Research Lab. (USA) and SFA (USA) )
Houston, B. ( U.S. Naval Research Lab. (USA) )

掲載資料名:

Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications : 19-22 June 2006, Ancona, Italy

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6345

発行年:

2006

開始ページ:

63451C

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819464217 [081946421X]

言語:

英語

請求記号:

P63600/6345

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016350
シリーズID:	PA00000029
会議名:	International Conference on Vibration Measurements by Laser Techniques
回次:	2006 : 7th
会議開催地:	Ancona, Italy
会議開催年:	2006.06.19-2006.06.22

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