Resolution improvement of computationally reconstructed 3D images by use of intermediate elemental images [6312-75]
- 著者名:
- Park, J.-S.
- Hwang, D.-C.
- Shin, D.-H. ( Kwangwoon Univ. (South Korea) )
- 掲載資料名:
- Applications of digital image processing XXIX : 15-17 August 2006, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6312
- 発行年:
- 2006
- 開始ページ:
- 63121P
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819463913 [0819463914]
- 言語:
- 英語
- 請求記号:
- P63600/6312
- 資料種別:
- 国際会議録
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12
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Characterization and improvement of resist pattern collapse on ArF (193 nm) organic B.A.R.C.
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