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A study for effect of rounded contact hole pattern by laser mask writng machine onto wafer process margin [6283-15]

著者名:
Park, -J. S.
Yoon, -H. K.
Kang, -H. J.
Choi, -Y. J.
Lee, -S. Y.
Kim. K. ( Dongbu Electronics (South Korea) )
さらに 1 件
掲載資料名:
Photomask and Next-Generation Lithography Mask Technology XIII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6283
発行年:
2006
パート:
1
開始ページ:
62831K
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463586 [0819463582]
言語:
英語
請求記号:
P63600/6283
資料種別:
国際会議録

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