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A single-exposure approach for petterning 45 nm flash/DRAM contacthole mask [6283-117]

著者名:
Chen, T.
Van Den Broeke, D.
Tejnil, E.
Hsu, S.
Park, S.
Berger, G.
Coskun, T.
De Vocht, J.
Corcoran, N.
Chen, F. J. ( ASML MaskTools (USA) )
van der Heijden, E.
Finders, J.
Engelen, A. ( ASML (Netherlands) )
Socha, R. ( ASML TDL (USA) )
さらに 9 件
掲載資料名:
Photomask and Next-Generation Lithography Mask Technology XIII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6283
発行年:
2006
パート:
1
開始ページ:
62831A
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463586 [0819463582]
言語:
英語
請求記号:
P63600/6283
資料種別:
国際会議録

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