Automatic pitch decomposition for improved process window when printing dense features at keff<0.20 [6283-102]
- 著者名:
Huckabay, J. Staud, W. Naber, R. ( Cadence Design Systems, Inc. (USA) ) Dusa, M. Flagello, D. Socha, R. ( ASML (USA) ) - 掲載資料名:
- Photomask and Next-Generation Lithography Mask Technology XIII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6283
- 発行年:
- 2006
- パート:
- 1
- 開始ページ:
- 62830T
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819463586 [0819463582]
- 言語:
- 英語
- 請求記号:
- P63600/6283
- 資料種別:
- 国際会議録
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