Simulation of electron scattering in thin films using Monte-Carlo method in discrete looses approximation [6278-18]

Simulation of electron scattering in thin films using Monte-Carlo method in discrete looses approximation [6278-18]

著者名:

Borisov S. S. ( M. V. Lomonosov Moscow State Univ. (Russia) )
Zaitsev S. I. ( Institute of Problems of Microelectronic Technology (Russia) )
Grachev E. A.
Ivanov N. ( M. V. Lomonosov Moscow State Univ. (Russia) )

掲載資料名:

Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics : 25-27 May 2005, Moscow, Russia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6278

発行年:

2006

開始ページ:

62780I

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819463487 [0819463485]

言語:

英語

請求記号:

P63600/6278

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016286
シリーズID:	PA00000029
会議名:	Seminar on Problems of Theoretical and Applied Electron and Ion Optics
回次:	2005 : 7th
会議開催地:	Moscow, Russia
会議開催年:	2005.05.25-2005.05.27

類似資料:

1 国際会議録 Electron beam with homogeneous solids interaction simulation using Monte-Carlo method in discrete looses approximation Borisov, S.S., Grachev, E.A., Zaitsev, S.I. SPIE - The International Society of Optical Engineering	7 国際会議録 High-power magnetron-injection gun with the interception of the electrons reflected from the magnetic mirror [6278-06] Ilyakov E. V., Kulagin I. S., Manuilov V. N., Zaitsev N. I. SPIE - The International Society of Optical Engineering
2 国際会議録 Computation of charge and energy deposited during electron beam irradiation depth distributions in discrete looses approximation [6278-20] Borisov S. S., Zaitsev S. I., Grachev E. A. SPIE - The International Society of Optical Engineering	8 国際会議録 High-Energy Electron Scattering from Selected Diatomics Using Monte Carlo Methods S. A. Alexander, Sumita Datta, R. L. Coldwell American Chemical Society
3 国際会議録 Software tool for advanced Monte Carlo simulation of electron scattering in EBL and SEM: CHARIOT Babin, S.V., Borisov, S., Cheremukhin, E., Grachev, E., Korol, V., Ocola, L.E. SPIE-The International Society for Optical Engineering	9 国際会議録 Simulation of spectral reflectance of multiple scattering medium using the Mie theory combined with the Monte Carlo method Igarashi, M., Gono, K., Obi, T., Yamaguchi, M., Ohyama, N. SPIE-The International Society for Optical Engineering
4 国際会議録 One particularity of energy-angular secondary electrons spectrum [6278-19] Borisov S. S., Zaitsev S. I. SPIE - The International Society of Optical Engineering	10 国際会議録 Evaluation of scatter correction methods using Monte Carlo simulation in nonuniform media El,Fakhri,G., Maksud,P., Aurengo,A. SPIE-The International Society for Optical Engineering
5 国際会議録 Determination of subsurface structure parameters of a sample using secondary electrons energy spectrums [6278-21] Borisov S. S., Zaitsev S. I., Bloshenko A., Misutina T. SPIE - The International Society of Optical Engineering	11 国際会議録 Modeling of Iinewidth measurement in SEMs using advanced Monte Carlo software [6152-193] Babin, S., Borisov, S., Ivanchikov, A., Ruzavin, I. SPIE - The International Society of Optical Engineering
6 国際会議録 Modeling of dielectric polarization during an electron beam exposure Borisov, S.S., Grachev, E.A., Zaitsev, S.I., Negulyaev, N.N., Cheremukhin, E.A. SPIE - The International Society of Optical Engineering	12 国際会議録 Monte Carlo Simulation of Thin Magnetic Films Critical Behavior P.V. Prudnikov, A.P. Soldusova, M.A. Medvedeva, N.I. Piskunova Trans Tech Publications

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