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Improved throughput of deep high-aspect-ratio trenches using split-beam laser ablation [6261-84]

著者名:
  • Braun, M. D. ( Hewlwtt-Packard Co. (USA) )
  • Gu, J. ( Hewlett Packard Singapore (Private) Ltd. (Singapore) )
  • Oram, J. R. ( Hewlwtt-Packard Co. (USA) )
掲載資料名:
High-Power Laser Ablation VI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6261
発行年:
2006
パート:
2
開始ページ:
62612C
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463265 [0819463264]
言語:
英語
請求記号:
P63600/6261
資料種別:
国際会議録

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