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Controlled change of structure and properties of nanometer polymer layers deposited by electron beam polymerization from vapour phase [6260-19]

著者名:
Bruk, A. M.
Spirin, V. A.
Volegova, A. I. ( Karpov Institute of Physical Chemistry (Russia) )
Zhikharev, N. E.
Kal’nov, A. V. ( Physical and Technology Institute (Russia) )
Godovsky, K. Yu. ( Karpov Institute of Physical Chemistry (Russia) )
さらに 1 件
掲載資料名:
Micro- and Nanoelectronics 2005
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6260
発行年:
2006
開始ページ:
62600J
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463258 [0819463256]
言語:
英語
請求記号:
P63600/6260
資料種別:
国際会議録

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