A self-consistent model for the HCI dc glow discharge: plasma parameters and active particles kinetics [6260-09]

A self-consistent model for the HCI dc glow discharge: plasma parameters and active particles kinetics [6260-09]

著者名:

Efremov, M. A.
Svettsov, I. V. ( Ivanovo State Univ. of Chemistry and Tecvhnology (Russia) )

掲載資料名:

Micro- and Nanoelectronics 2005

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6260

発行年:

2006

開始ページ:

626009

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819463258 [0819463256]

言語:

英語

請求記号:

P63600/6260

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016269
シリーズID:	PA00000029
会議名:	ICMNE
回次:	2005
会議開催地:	Zvenigorod, Russia
会議開催年:	2005.10.03-2005.10.07

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