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Dynamic analysis of a pressure sensor diaphragm coupled with an air-backed cavity [6166-41]

著者名:
  • Chen, Z. ( Univ. of Maryland, College Park (USA) )
  • Yu, M. ( Univ. of Maryland, College Park (USA) )
掲載資料名:
Smart structures and materials 2006 : Modeling, signal processing, and control : 27 February-2 March 2006, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6166
発行年:
2006
開始ページ:
616614
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819462190 [0819462195]
言語:
英語
請求記号:
P63600/6166
資料種別:
国際会議録

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