Immersion specific defect mechanisms: findings and recommendations for their control [6154-180]

Immersion specific defect mechanisms: findings and recommendations for their control [6154-180]

著者名:

Kocsis, M. ( IMEC (Belgium) and Intel Corp. (USA) )

Van Den Heuvel, D. ( IMEC (Belgium) )

Gronheid, R. ( IMEC (Belgium) )

Maenhoudt, M. ( IMEC (Belgium) )

Vangoidsenhoven, D. ( IMEC (Belgium) )

Wells, G. ( IMEC (Belgium) and Texas Instruments Inc. (USA) )

Stepanenko, N. ( IMEC (Belgium) and Technologies SC300GmbH & Co. OHG (Germany) )

Benndorf, M. ( Philips Research Europe (Belgium) )

Kim, H. W ( IMEC (Belgium) and Samsung Electronics Co. Ltd. (South Kored) )

Kishimura, S. ( IMEC (Belgium) and Matsushita Electric Industrial Co. Ltd, (Japan) )

Ercken, M. ( IMEC (Belgium) )

Van Roey, F. ( IMEC (Belgium) )

O’Brien, S. ( IMEC (Belgium) and Texas Instruments Inc, (USA) )

Fyen, W. ( IMEC IMEC (Belgium) )

Foubert, P ( IMEC IMEC (Belgium) )

Moerman, R ( ASML (Netherlands) )

Streefkerk, B. ( ASML (Netherlands) )

さらに 12 件

掲載資料名:

Optical Microlithography XIX

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6154

発行年:

2006

パート:

1

開始ページ:

615409

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461971 [0819461970]

言語:

英語

請求記号:

P63600/6154

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016186
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Optical Microlithography
回次:	2006 : 19th
会議開催地:	San Jose, CA, USA
会議開催年:	2006.02.21-2006.02.24

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2 国際会議録 Measurement and evaluation of water uptake by resists, top coats, stacks, and correlation with watermark defects P. Foubert, M. Kocsis, R. Gronheid, S. Kishimura, A. Soyano, K. Nafus, N. Stepanenko, J. D. Backer, N. Vandenbroeck, M. … SPIE - The International Society of Optical Engineering	8 国際会議録 A dive into clear water: immersion defect capabilities [6154-28] Streefkerk, B., Nulkens, J., Moerman, R., Stacenga, M., Van der Hoeven, J., Grouwstra, C., Bruis, R., Leenders, M., … SPIE - The International Society of Optical Engineering
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