Adamantane based molecuiar glass resist for 193 nm lithography [6153-85]
- 著者名:
- 掲載資料名:
- Advances in Resist Technology and Processing XXIII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6153
- 発行年:
- 2006
- パート:
- 1
- 開始ページ:
- 61532B
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461964 [0819461962]
- 言語:
- 英語
- 請求記号:
- P63600/6153
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
11
国際会議録
Silicon containing polymer in applications for 193-nm high-NA lithography processes [6153-20]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |