Polymer structure modifications for immersion leaching and watermark control [6153-77]
- 著者名:
Lee, J W ( Dongjin Semichem Co Ltd (South Korea) ) Oh, S K ( Dongjin Semichem Co Ltd (South Korea) ) Kim, J W ( Dongjin Semichem Co Ltd (South Korea) ) Lee, S H ( Dongjin Semichem Co Ltd (South Korea) ) Jeong, Y H ( Dongjin Semichem Co Ltd (South Korea) ) Kim, S S ( Dongjin Semichem Co Ltd (South Korea) ) Park, M H ( Dongjin Semichem Co Ltd (South Korea) ) Kim, D ( Dongjin Semichem Co Ltd (South Korea) ) Kim, J ( Dongjin Semichem Co Ltd (South Korea) ) Lee, G ( Hynix Semiconductor Co Ltd (South Korea) ) Moon, S C ( Hynix Semiconductor Co Ltd (South Korea) ) - 掲載資料名:
- Advances in Resist Technology and Processing XXIII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6153
- 発行年:
- 2006
- パート:
- 1
- 開始ページ:
- 615311
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461964 [0819461962]
- 言語:
- 英語
- 請求記号:
- P63600/6153
- 資料種別:
- 国際会議録
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