Blank Cover Image

Error factor in bottom CD measurement for conta.ct hole using CD-SEM [6152-185]

著者名:
掲載資料名:
Metrology, Inspection, and Process Control for Microlithography XX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6152
発行年:
2006
パート:
2
開始ページ:
61524H
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
言語:
英語
請求記号:
P63600/6152
資料種別:
国際会議録

類似資料:

1 国際会議録 Evaluation of CD-SEM measurement uncertainty using secondary electron simulation with charging effect

H. Abe, A. Hamaguchi, Y. Yamazaki

SPIE - The International Society of Optical Engineering
7 国際会議録 CD-SEM calibration with TEM to reduce CD measurement error

Jeong, C.-Y., Lee, J., Park, K.-Y., Lee, W.G., Lee, D.-H.

SPIE-The International Society for Optical Engineering
2 国際会議録 Measurement precision of CD-SEM for 65-nm technology node

Abe, H., Motoki, H., Ikeda, T., Yamazaki, Y.

SPIE - The International Society of Optical Engineering
8 国際会議録 Bias-free measurement of LER/LWR with low damage by CD-SEM [6152-89]

Yamaguchi, A., Steffen, R., Kawada, H., Iizumi, T.

SPIE - The International Society of Optical Engineering
3 国際会議録 Evaluation of OPC quality using automated edge placement error measurement with CD-SEM [6152-51]

Tabery, C., Morokuma, H., Sugiyama, A., Page, L.

SPIE - The International Society of Optical Engineering
9 国際会議録 Influence of electron incident angle distribution on CD-SEM Iinewidth measurements [6152-160]

Tanaka, M., Shishido, C., Kawada, H.

SPIE - The International Society of Optical Engineering
4 国際会議録 Three-dimensional measurement by tilting and moving objective lens in CD-SEM

Kimura, K., Abe, K., Tsuruga, Y., Suzuki, H., Kochi, N., Koike, H., Yamazaki, Y.

SPIE-The International Society for Optical Engineering
10 国際会議録 Statistical analysis of CD-SEM measurement and process control in the indistinguishable multi-process patterns [6152-100]

Yang, D. S., Jung, M. H., Lee, Y. M., Koh, C. W., Yeo, G. S., Woo, S. G., Cho, H. K., Moon, J. T.

SPIE - The International Society of Optical Engineering
5 国際会議録 Three-dimensional measurement by tilting and moving objective lens in CD-SEM (II)

Abe, K., Kimura, K., Tsuruga, Y., Okada, S.-, Suzuki, H., Kochi, N., Koike, H., Hamaguchi, A., Yamazaki, Y.

SPIE - The International Society of Optical Engineering
11 国際会議録 Development of the automatic recipe generation system for CD-SEM using design data [6152-191]

Matsuoka, R., Miyamoto, A., Nagatomo, W, Morokuma, H., Sutani, T

SPIE - The International Society of Optical Engineering
6 国際会議録 Inline CO metrology with combined use of scatterometry and CO-SEM [6152-69]

Asano, M., Ikeda, T., Koike, T., Abe, H.

SPIE - The International Society of Optical Engineering
12 国際会議録 Landing energy influence on CD-SEM measurement precision and accuracy [6152-187]

Fabre, A. L., Foucher, J., Poulingue, M., Fabre, P., Sundaram, G.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12