Critical dimension variations of I-line processes due to swing effects [6152-153]
- 著者名:
Berger, C. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Schiwon, R. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Trepte, S. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Friedrich, M. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Kubis, M. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Horst, J ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Grandpierre, A. G. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) - 掲載資料名:
- Metrology, Inspection, and Process Control for Microlithography XX
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6152
- 発行年:
- 2006
- パート:
- 2
- 開始ページ:
- 61523T
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461957 [0819461954]
- 言語:
- 英語
- 請求記号:
- P63600/6152
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |