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Benchmark comparison of multiple process control strategies for lithographic CD control [6152-14]

著者名:
  • Kang, W. ( Naval Postgraduate School (USA) )
  • Mao, J. ( Intel Corp. (USA) )
掲載資料名:
Metrology, Inspection, and Process Control for Microlithography XX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6152
発行年:
2006
パート:
1
開始ページ:
61520E
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
言語:
英語
請求記号:
P63600/6152
資料種別:
国際会議録

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