Advanced DFM applications using design-based metrology on CD SEM [6152-194]
- 著者名:
Lorusso, G. F. ( KLA-Tencor (USA) ) Capodieci, L. ( Advanced Micro Devices, Inc (USA) ) Stoler, D. ( KLA-Tencor (USA) ) Schulz, B. ( Advanced Mocro Devices, Inc. (USA) ) Roling, S. ( Advanced Mocro Devices, Inc. (USA) ) Schramm, J. ( Advanced Mocro Devices, Inc. (USA) ) Tabery, C. ( Advanced Mocro Devices, Inc. (USA) ) Shah, K. ( Advanced Mocro Devices, Inc. (USA) ) Singh, B. ( Advanced Mocro Devices, Inc. (USA) ) Abbott, G. ( KLA-Tencor (USA) ) Azordegan, A. ( KLA-Tencor (USA) ) Heinrichs, L. ( KLA-Tencor (USA) ) Kaliblotzky, Z. ( KLA-Tencor (USA) ) Castel, E. ( KLA-Tencor (USA) ) - 掲載資料名:
- Metrology, Inspection, and Process Control for Microlithography XX
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6152
- 発行年:
- 2006
- パート:
- 1
- 開始ページ:
- 61520B
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461957 [0819461954]
- 言語:
- 英語
- 請求記号:
- P63600/6152
- 資料種別:
- 国際会議録
類似資料:
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3
国際会議録
Evaluation of OPC quality using automated edge placement error measurement with CD-SEM [6152-51]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |