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Application of cellular neural networks in the measurement of Iinewidth and line edge roughness [6150-115]

著者名:
  • Li, H. ( Harbin Institute of Technology (China) )
  • Zhao, X. ( Harbin Institute of Technology (China) )
  • Chu, W. ( Harbin Institute of Technology (China) )
  • Li, N. ( Harbin Institute of Technology (China) )
掲載資料名:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6150
発行年:
2006
パート:
2
開始ページ:
61504S
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461896 [081946189X]
言語:
英語
請求記号:
P63600/6150
資料種別:
国際会議録

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